A 6.4 magnitude earthquake struck a mountainous area of Taiwan's south on Tuesday near the city of Chiayi, the island's weather administration said, with reports of initial minor damage.
Chipmaker TSMC said it had evacuated staff at its factories in central and southern Taiwan.
The quake shook buildings in the capital, Taipei. The quake had a depth of 9.4 km (6 miles) with its epicenter in Dapu township, the weather administration said.
The fire department said three people were trapped in a damaged building in the city of Tainan and rescue workers were on their way.
The science park in Tainan, home to major factories including of chipmaker TSMC, said buildings were evacuated.
Taiwan lies near the junction of two tectonic plates and is prone to earthquakes.
In April, a 7.2 magnitude quake hit the east coast county of Hualien, killing 13 people.
More than 100 people were killed in a quake in southern Taiwan in 2016 and a 7.3 magnitude quake killed more than 2,000 people in 1999.